Title : Polysilicon thermal flexure actuator
Keywords : Mechanics of Marerials
This is a U-board composed of Poly-Si, Si, Si3N4, and SiO2. It’s a asymmetrical thermal expansion of a microstructure with variable cross sections. The narrower section expanses more than the wider one when current passes though the actuator.
Because of the different thermal expansion, the actuator moves laterally. In this way, we can optimize the actuator structure to move many objects by lateral deflection.