YC Tsai Research Plan

【蔡燿全個人研究計畫】2009/02/20yctsai014

題目:原子力顯微鏡熱電探針
技術:奈微米機電系統製成,電子束微影系統,微結構力學。
利用微機電黃光微影與電子束微影技術配合金屬蒸鍍,在原子力顯微鏡探針上製作導電電路,使其可以量測奈米解析度的溫度分布,並配合熱電理論探討材料的熱電特性。

Title: Scanning Thermal Microscope Tip
Key Technology: MEMS fabrication, E-beam lithography system, Micro-structural mechanics.

The scanning thermal microscope (SThM) tip was fabricated by the photolithography process, e-beam lithography process and metal evaporation process. The conductive path was patterned on the atomic force microscope (AFM) probe and across the tip for temperature distribution measurement in nanoscale resolution.

 yctsai024

題目:微米維度量測圓球探針
技術:奈微米機電系統製成,微結構力學,光學原理。
本研究提出一種不需要光罩即可製作出可用於微米三維量測系統中高真球度的探針,SU-8高分子微米球體在液體中製作並利用表面張力達到微米球體的高真球度,自我對準方法也被用於直接在微米球體下直接製作碳針柱,並可使用乾蝕刻(電感耦合電漿蝕刻)增加製作出來的探針柱的高度,將來也可用於在微米三維量測系統的校正部份。

Title: Scanning Thermal Microscope Tip
Key Technology: MEMS fabrication, Micro-structural mechanics, Optic theorem.

This research is focus on a mask-free fabrication of styluses with high sphericity for micro coordinate measurement machine (μCMM), a mechanical system using micro-scale contact probes to measure the profile of high-aspect-ratio micro-structures. This new process combines micro-pellet and stylus into one mechanical device.

發表迴響

在下方填入你的資料或按右方圖示以社群網站登入:

WordPress.com Logo

You are commenting using your WordPress.com account. Log Out / 變更 )

Twitter picture

You are commenting using your Twitter account. Log Out / 變更 )

Facebook照片

You are commenting using your Facebook account. Log Out / 變更 )

Google+ photo

You are commenting using your Google+ account. Log Out / 變更 )

連結到 %s

%d 位部落客按了讚: