CC Huang Research Plan

【黃承俊個人研究計畫】2009/10/01

題目:奈米碳管電晶體在微機電系統的應用
技術:奈米碳管合成技術、微機電製程、深次微米元件物理與製程、感測原理

將奈米碳管電晶體整合微機電製程技術,製作出具有感測能力的元件,例如:力感測器、生物感測器……等。

Title: The application of CNT-FETs bases on MEMs

Key Technology: Synthesis of CNT、MEMs fabrication、Sub-micro device physics and process、Principles of Sensors

Using CNT-FETs integrated with MEMs technology to fabrication the sensor device. For example, force sensor and biosensor.

 

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