HY Hong Research Plan

【 洪宏耀個人研究計畫】2009/02/20

hyhong012

 

題目:CMOS-MEMS微陀螺儀

技術:奈微米機電系統製成,基礎電路設計模擬,結構模擬。
利用現已技術成熟之互補式金屬氧化半導體(CMOS)標準製程的基礎上,結合微機電系統(MEMS)來製作微陀螺儀;即在一個晶片上同時設計角速度感測機械結構與其相對應之感測電路,藉由製程的標準化可方便於結構設計並降低成本,且結構與電路的結合也可降低感測訊號可能受到的外界干擾。

Title:CMOS-MEMS Micro Gyroscope
Keywords:CMOS-MEMS、Gyroscope

The research focuses on the fabrication of Microgyroscope through standard CMOS process which can make the structure design easier and reduce the cost. The gyroscope chip will be integrated the sensing structure (MEMS) with the signal processing circuit (CMOS), that will effectively reduce the noise signal from outside.

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