TUNABLE SOLENOID MICROINDUCTORS

This work presents a first-of-its-kind micromachined tunable solenoid microinductor with tuning ratio as high as 18:1 at 10kHz. A tuning mechanism using a permalloy linear vibromotor enables low power consumption, low driving voltage (less than 1 volt), and long travel distance. A low temperature batch process is developed to integrate the microinductor structure and vibromotor. The measured inductance is on the order of 10nH and rolls off at 1MHz. Potential applications include performance optimization and functionality enhancement to magnetic microsensors and micromagnetic power devices, such as dc/dc converter.

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