MICRO COORDIBATE MEASUREMENT

A three-dimensional microprobe, which is capable of measuring the forces exerting on the probing pin in all directions, is presented. The microprobe is fabricated on stainless steel and is covered by two sets of piezoelectric transducers. One of the transducers drives the probe, and the other senses the dynamic response to identify the contact between the pin and obstacles. A theoretical model is carried out to investigate the transition of the microprobe between contact and non-contact states. Accordingly, a bifurcation diagram is established to provide a design reference for the optimization of driving frequency. A finite element simulation is also carries out for the complete design optimization. Indeed, the fabricated microprobe can be used for the coordinate measurement of the high-aspect-ratio micro-structures.

research13research141

發表迴響

在下方填入你的資料或按右方圖示以社群網站登入:

WordPress.com Logo

您的留言將使用 WordPress.com 帳號。 登出 / 變更 )

Twitter picture

您的留言將使用 Twitter 帳號。 登出 / 變更 )

Facebook照片

您的留言將使用 Facebook 帳號。 登出 / 變更 )

Google+ photo

您的留言將使用 Google+ 帳號。 登出 / 變更 )

連結到 %s

%d 位部落客按了讚: